A one-dimensional 280-nm period silicon grating designed to exhibit polarization-dependent reflection or antireflection behavior at visible wavelengths has been fabricated and tested. For normally incident 575-nm light, this grating reflects less than 3% of the incident radiation polarized perpendicular to the grating grooves and approximately 23% of the orthogonal polarization. To demonstrate the grating’s broadband characteristics, reflectance measurements are presented over the free-space wavelength range 475 nm < λ0 < 800 nm, for angles of incidence in the range 0° < θ < 40°, for polarization parallel and perpendicular to the grating grooves, and for planes of incidence parallel and perpendicular to the grooves. A description of the fabrication process is also given.
© 1998 Optical Society of AmericaFull Article | PDF Article
B. W. Shore, M. D. Perry, J. A. Britten, R. D. Boyd, M. D. Feit, H. T. Nguyen, R. Chow, G. E. Loomis, and Lifeng Li
J. Opt. Soc. Am. A 14(5) 1124-1136 (1997)
Thomas K. Gaylord, E. N. Glytsis, and M. G. Moharam
Appl. Opt. 26(15) 3123-3135 (1987)
Nile F. Hartman and Thomas K. Gaylord
Appl. Opt. 27(17) 3738-3743 (1988)