Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Laser beam lithographed micro-Fresnel lenses

Not Accessible

Your library or personal account may give you access

Abstract

Laser beam lithography for micro-Fresnel lenses (MFLs) with blazed grooves is proposed and demonstrated including the system configuration and characteristics of the resulting lenses. The resolution is even better than that of electron-beam lithography in forming 1-μm deep relief gratings in resist. A laser beam lithographed MFL with a diameter as large as 9.6 mm is described as well as a compact MFL (N.A. 0.21) butt coupled to an optical waveguide. In these two distinct MFLs, nearly diffraction-limited spot sizes have been obtained with diffraction efficiencies of 50% or more. A specific MFL array used for an integrated optic laser Doppler velocimeter is also presented.

© 1990 Optical Society of America

Full Article  |  PDF Article
More Like This
ZnS micro-Fresnel lens and its uses

Hayami Hosokawa and Tsukasa Yamashita
Appl. Opt. 29(34) 5106-5110 (1990)

Reflection micro-Fresnel lenses and their use in an integrated focus sensor

Teruhiro Shiono, Masatoshi Kitagawa, Kentaro Setsune, and Tsuneo Mitsuyu
Appl. Opt. 28(16) 3434-3442 (1989)

Rectangular-apertured micro-Fresnel lens arrays fabricated by electron-beam lithography

Teruhiro Shiono, Kentaro Setsune, Osamu Yamazaki, and Kiyotaka Wasa
Appl. Opt. 26(3) 587-591 (1987)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved