Abstract

An optical noncontact profilometer that combines features of other instruments of this type is described. Three measurement ranges are possible. A resolution of ∼2 nm over a 1-μm range is experimentally demonstrated. The mathematical description of the method, based on the theory of the Gaussian laser beam, gives a simple analytical form that allows convenient application and optimization over a wide range. Validity of the theory is experimentally verified.

© 1983 Optical Society of America

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  1. T. L. Williams, Opt. Acta 25, 1155 (1978).
    [CrossRef]
  2. T. Sawatari, R. B. Ziplin, Opt. Eng. 18, 222 (1978).
  3. F. T Arecchi, D. Bertani, S. Ciliberto, Opt. Commun. 31, 263 (1979).
    [CrossRef]
  4. S. Uchida, H. Sato, M. O-hori, Ann. CIRP 28, 419 (1979).
  5. M. Shiraishi, “In Process Measurement of Surface Roughness in Machining by Double Beam Method” in Proceedings, Fourth International Conference of Production Engineering, Tokyo (1980).
  6. L. Parker, Laser Focus 7, 40 (1980).
  7. Y. Fainman, E. Lenz, J. Shamir, Appl. Opt. 21, 3200 (1982).
    [CrossRef] [PubMed]
  8. H. Kogelnik, T. Li, Proc. IEEE 54, 1312 (1966).
    [CrossRef]
  9. L. D. Dickson, Appl. Opt. 9, 1854 (1970).
    [CrossRef] [PubMed]
  10. R. Jóźwicki, Optyka 1, 7 (1977) (in Polish).
  11. A. Yoshida, T. Asakura, Optik 41, 281 (1974).

1982 (1)

1980 (1)

L. Parker, Laser Focus 7, 40 (1980).

1979 (2)

F. T Arecchi, D. Bertani, S. Ciliberto, Opt. Commun. 31, 263 (1979).
[CrossRef]

S. Uchida, H. Sato, M. O-hori, Ann. CIRP 28, 419 (1979).

1978 (2)

T. L. Williams, Opt. Acta 25, 1155 (1978).
[CrossRef]

T. Sawatari, R. B. Ziplin, Opt. Eng. 18, 222 (1978).

1977 (1)

R. Jóźwicki, Optyka 1, 7 (1977) (in Polish).

1974 (1)

A. Yoshida, T. Asakura, Optik 41, 281 (1974).

1970 (1)

1966 (1)

H. Kogelnik, T. Li, Proc. IEEE 54, 1312 (1966).
[CrossRef]

Arecchi, F. T

F. T Arecchi, D. Bertani, S. Ciliberto, Opt. Commun. 31, 263 (1979).
[CrossRef]

Asakura, T.

A. Yoshida, T. Asakura, Optik 41, 281 (1974).

Bertani, D.

F. T Arecchi, D. Bertani, S. Ciliberto, Opt. Commun. 31, 263 (1979).
[CrossRef]

Ciliberto, S.

F. T Arecchi, D. Bertani, S. Ciliberto, Opt. Commun. 31, 263 (1979).
[CrossRef]

Dickson, L. D.

Fainman, Y.

Józwicki, R.

R. Jóźwicki, Optyka 1, 7 (1977) (in Polish).

Kogelnik, H.

H. Kogelnik, T. Li, Proc. IEEE 54, 1312 (1966).
[CrossRef]

Lenz, E.

Li, T.

H. Kogelnik, T. Li, Proc. IEEE 54, 1312 (1966).
[CrossRef]

O-hori, M.

S. Uchida, H. Sato, M. O-hori, Ann. CIRP 28, 419 (1979).

Parker, L.

L. Parker, Laser Focus 7, 40 (1980).

Sato, H.

S. Uchida, H. Sato, M. O-hori, Ann. CIRP 28, 419 (1979).

Sawatari, T.

T. Sawatari, R. B. Ziplin, Opt. Eng. 18, 222 (1978).

Shamir, J.

Shiraishi, M.

M. Shiraishi, “In Process Measurement of Surface Roughness in Machining by Double Beam Method” in Proceedings, Fourth International Conference of Production Engineering, Tokyo (1980).

Uchida, S.

S. Uchida, H. Sato, M. O-hori, Ann. CIRP 28, 419 (1979).

Williams, T. L.

T. L. Williams, Opt. Acta 25, 1155 (1978).
[CrossRef]

Yoshida, A.

A. Yoshida, T. Asakura, Optik 41, 281 (1974).

Ziplin, R. B.

T. Sawatari, R. B. Ziplin, Opt. Eng. 18, 222 (1978).

Ann. CIRP (1)

S. Uchida, H. Sato, M. O-hori, Ann. CIRP 28, 419 (1979).

Appl. Opt. (2)

Laser Focus (1)

L. Parker, Laser Focus 7, 40 (1980).

Opt. Acta (1)

T. L. Williams, Opt. Acta 25, 1155 (1978).
[CrossRef]

Opt. Commun. (1)

F. T Arecchi, D. Bertani, S. Ciliberto, Opt. Commun. 31, 263 (1979).
[CrossRef]

Opt. Eng. (1)

T. Sawatari, R. B. Ziplin, Opt. Eng. 18, 222 (1978).

Optik (1)

A. Yoshida, T. Asakura, Optik 41, 281 (1974).

Optyka (1)

R. Jóźwicki, Optyka 1, 7 (1977) (in Polish).

Proc. IEEE (1)

H. Kogelnik, T. Li, Proc. IEEE 54, 1312 (1966).
[CrossRef]

Other (1)

M. Shiraishi, “In Process Measurement of Surface Roughness in Machining by Double Beam Method” in Proceedings, Fourth International Conference of Production Engineering, Tokyo (1980).

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