Abstract

The complex dielectric function of SiO0.6N0.2 coatings, produced by reactive electron-beam deposition, was evaluated in the 5–50-μm range. The composition was determined by Rutherford backscattering spectrometry. The IR optical properties of the films make them well suited for radiative cooling applications.

© 1983 Optical Society of America

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  1. T. S. Eriksson, C. G. Granqvist, Appl. Opt. 21, 4381 (1982).
    [CrossRef] [PubMed]
  2. C. G. Granqvist, A. Hjortsberg, J. Appl. Phys. 52, 4205 (1981).
    [CrossRef]
  3. C.-E. Morosanu, Microelectron. Reliab. 20, 357 (1980).
    [CrossRef]
  4. C.-E. Morosanu, Thin Solid Films 65, 171 (1980).
    [CrossRef]
  5. A. Hjortsberg, C. G. Granqvist, Appl. Opt. 19, 1694 (1980).
    [CrossRef] [PubMed]
  6. C. G. Granqvist, A. Hjortsberg, T. S. Eriksson, in Solar World Forum, D. O. Hall, J. Morton, Eds. (Pergamon, Oxford, 1982), Vol. 1, p. 562;Thin Solid Films 90, 187 (1982).
  7. T. S. Eriksson, A. Hjortsberg, C. G. Granqvist, in Proceedings, Seventh International Conference on Vacuum Metallurgy: Metallurgical Coatings (Iron and Steel Institute of Japan, Japan Institute of Metals, Vacuum Society of Japan, Tokyo, 1982), p. 696.
  8. W. Heitmann, Appl. Opt. 10, 2690 (1971).
    [CrossRef]
  9. E. A. Taft, J. Electrochem. Soc. 118, 1341 (1971).
    [CrossRef]
  10. W. A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).
    [CrossRef]
  11. T. L. Chu, J. R. Szedon, C. H. Lee, J. Electrochem. Soc. 115, 318 (1968).
    [CrossRef]
  12. F. L. Edelman, Phys. Status Solidi A 51, 375 (1979).
    [CrossRef]
  13. L. V. Khramova, T. P. Smirnova, B. M. Ayupov, V. I. Belyi, Neorg. Mater. 16, 1420 (1980)[Inorg. Mater. USSR 16, 973 (1981)].
  14. R. I. Frank, W. L. Moberg, J. Electrochem. Soc. 117, 524 (1970).
    [CrossRef]
  15. A. D. Yadav, M. C. Joshi, Thin Solid Films 91, 45 (1982).
    [CrossRef]
  16. F. H. P. M. Habraken, A. E. T. Kuiper, Y. Tamminga, J. Appl. Phys. 53, 6996 (1982).
    [CrossRef]
  17. H. R. Philipp, J. Electrochem. Soc. 120, 295 (1973).
    [CrossRef]
  18. M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975).
  19. C. D. Salzberg, J. J. Villa, J. Opt. Soc. Am. 47, 244 (1957).
    [CrossRef]
  20. E. V. Loewenstein, D. R. Smith, R. L. Morgan, Appl. Opt. 12, 398 (1973).
    [CrossRef] [PubMed]
  21. J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, Part 2, Physics Data Vol. 18-2 (Fachinformationszentrum Energie, Physik, Mathematik, GmbH, Karlsruhe, Germany, 1981), p. 65.
  22. A. Hjortsberg, Appl. Opt. 20, 1254 (1981).
    [CrossRef] [PubMed]
  23. T. S. Eriksson, A. Hjortsberg, G. A. Niklasson, C. G. Granqvist, Appl. Opt. 20, 2742 (1981).
    [CrossRef] [PubMed]
  24. P.-O. Nilsson, L. Munkby, Phys. Condens. Mater. 10, 290 (1969).
  25. D. M. Brown, P. V. Gray, F. K. Heumann, H. R. Philipp, E. A. Taft, J. Electrochem. Soc. 115, 311 (1968).
    [CrossRef]

1982

A. D. Yadav, M. C. Joshi, Thin Solid Films 91, 45 (1982).
[CrossRef]

F. H. P. M. Habraken, A. E. T. Kuiper, Y. Tamminga, J. Appl. Phys. 53, 6996 (1982).
[CrossRef]

T. S. Eriksson, C. G. Granqvist, Appl. Opt. 21, 4381 (1982).
[CrossRef] [PubMed]

1981

1980

A. Hjortsberg, C. G. Granqvist, Appl. Opt. 19, 1694 (1980).
[CrossRef] [PubMed]

C.-E. Morosanu, Microelectron. Reliab. 20, 357 (1980).
[CrossRef]

C.-E. Morosanu, Thin Solid Films 65, 171 (1980).
[CrossRef]

L. V. Khramova, T. P. Smirnova, B. M. Ayupov, V. I. Belyi, Neorg. Mater. 16, 1420 (1980)[Inorg. Mater. USSR 16, 973 (1981)].

1979

F. L. Edelman, Phys. Status Solidi A 51, 375 (1979).
[CrossRef]

1977

W. A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).
[CrossRef]

1973

1971

E. A. Taft, J. Electrochem. Soc. 118, 1341 (1971).
[CrossRef]

W. Heitmann, Appl. Opt. 10, 2690 (1971).
[CrossRef]

1970

R. I. Frank, W. L. Moberg, J. Electrochem. Soc. 117, 524 (1970).
[CrossRef]

1969

P.-O. Nilsson, L. Munkby, Phys. Condens. Mater. 10, 290 (1969).

1968

D. M. Brown, P. V. Gray, F. K. Heumann, H. R. Philipp, E. A. Taft, J. Electrochem. Soc. 115, 311 (1968).
[CrossRef]

T. L. Chu, J. R. Szedon, C. H. Lee, J. Electrochem. Soc. 115, 318 (1968).
[CrossRef]

1957

Ayupov, B. M.

L. V. Khramova, T. P. Smirnova, B. M. Ayupov, V. I. Belyi, Neorg. Mater. 16, 1420 (1980)[Inorg. Mater. USSR 16, 973 (1981)].

Belyi, V. I.

L. V. Khramova, T. P. Smirnova, B. M. Ayupov, V. I. Belyi, Neorg. Mater. 16, 1420 (1980)[Inorg. Mater. USSR 16, 973 (1981)].

Born, M.

M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975).

Brown, D. M.

D. M. Brown, P. V. Gray, F. K. Heumann, H. R. Philipp, E. A. Taft, J. Electrochem. Soc. 115, 311 (1968).
[CrossRef]

Chu, T. L.

T. L. Chu, J. R. Szedon, C. H. Lee, J. Electrochem. Soc. 115, 318 (1968).
[CrossRef]

Edelman, F. L.

F. L. Edelman, Phys. Status Solidi A 51, 375 (1979).
[CrossRef]

Eriksson, T. S.

T. S. Eriksson, C. G. Granqvist, Appl. Opt. 21, 4381 (1982).
[CrossRef] [PubMed]

T. S. Eriksson, A. Hjortsberg, G. A. Niklasson, C. G. Granqvist, Appl. Opt. 20, 2742 (1981).
[CrossRef] [PubMed]

C. G. Granqvist, A. Hjortsberg, T. S. Eriksson, in Solar World Forum, D. O. Hall, J. Morton, Eds. (Pergamon, Oxford, 1982), Vol. 1, p. 562;Thin Solid Films 90, 187 (1982).

T. S. Eriksson, A. Hjortsberg, C. G. Granqvist, in Proceedings, Seventh International Conference on Vacuum Metallurgy: Metallurgical Coatings (Iron and Steel Institute of Japan, Japan Institute of Metals, Vacuum Society of Japan, Tokyo, 1982), p. 696.

Frank, R. I.

R. I. Frank, W. L. Moberg, J. Electrochem. Soc. 117, 524 (1970).
[CrossRef]

Granqvist, C. G.

T. S. Eriksson, C. G. Granqvist, Appl. Opt. 21, 4381 (1982).
[CrossRef] [PubMed]

T. S. Eriksson, A. Hjortsberg, G. A. Niklasson, C. G. Granqvist, Appl. Opt. 20, 2742 (1981).
[CrossRef] [PubMed]

C. G. Granqvist, A. Hjortsberg, J. Appl. Phys. 52, 4205 (1981).
[CrossRef]

A. Hjortsberg, C. G. Granqvist, Appl. Opt. 19, 1694 (1980).
[CrossRef] [PubMed]

T. S. Eriksson, A. Hjortsberg, C. G. Granqvist, in Proceedings, Seventh International Conference on Vacuum Metallurgy: Metallurgical Coatings (Iron and Steel Institute of Japan, Japan Institute of Metals, Vacuum Society of Japan, Tokyo, 1982), p. 696.

C. G. Granqvist, A. Hjortsberg, T. S. Eriksson, in Solar World Forum, D. O. Hall, J. Morton, Eds. (Pergamon, Oxford, 1982), Vol. 1, p. 562;Thin Solid Films 90, 187 (1982).

Gray, P. V.

D. M. Brown, P. V. Gray, F. K. Heumann, H. R. Philipp, E. A. Taft, J. Electrochem. Soc. 115, 311 (1968).
[CrossRef]

Habraken, F. H. P. M.

F. H. P. M. Habraken, A. E. T. Kuiper, Y. Tamminga, J. Appl. Phys. 53, 6996 (1982).
[CrossRef]

Heitmann, W.

Heumann, F. K.

D. M. Brown, P. V. Gray, F. K. Heumann, H. R. Philipp, E. A. Taft, J. Electrochem. Soc. 115, 311 (1968).
[CrossRef]

Hjortsberg, A.

C. G. Granqvist, A. Hjortsberg, J. Appl. Phys. 52, 4205 (1981).
[CrossRef]

T. S. Eriksson, A. Hjortsberg, G. A. Niklasson, C. G. Granqvist, Appl. Opt. 20, 2742 (1981).
[CrossRef] [PubMed]

A. Hjortsberg, Appl. Opt. 20, 1254 (1981).
[CrossRef] [PubMed]

A. Hjortsberg, C. G. Granqvist, Appl. Opt. 19, 1694 (1980).
[CrossRef] [PubMed]

T. S. Eriksson, A. Hjortsberg, C. G. Granqvist, in Proceedings, Seventh International Conference on Vacuum Metallurgy: Metallurgical Coatings (Iron and Steel Institute of Japan, Japan Institute of Metals, Vacuum Society of Japan, Tokyo, 1982), p. 696.

C. G. Granqvist, A. Hjortsberg, T. S. Eriksson, in Solar World Forum, D. O. Hall, J. Morton, Eds. (Pergamon, Oxford, 1982), Vol. 1, p. 562;Thin Solid Films 90, 187 (1982).

Joshi, M. C.

A. D. Yadav, M. C. Joshi, Thin Solid Films 91, 45 (1982).
[CrossRef]

Khramova, L. V.

L. V. Khramova, T. P. Smirnova, B. M. Ayupov, V. I. Belyi, Neorg. Mater. 16, 1420 (1980)[Inorg. Mater. USSR 16, 973 (1981)].

Koch, E. E.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, Part 2, Physics Data Vol. 18-2 (Fachinformationszentrum Energie, Physik, Mathematik, GmbH, Karlsruhe, Germany, 1981), p. 65.

Krafka, C.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, Part 2, Physics Data Vol. 18-2 (Fachinformationszentrum Energie, Physik, Mathematik, GmbH, Karlsruhe, Germany, 1981), p. 65.

Kuiper, A. E. T.

F. H. P. M. Habraken, A. E. T. Kuiper, Y. Tamminga, J. Appl. Phys. 53, 6996 (1982).
[CrossRef]

Lee, C. H.

T. L. Chu, J. R. Szedon, C. H. Lee, J. Electrochem. Soc. 115, 318 (1968).
[CrossRef]

Loewenstein, E. V.

Lynch, D. W.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, Part 2, Physics Data Vol. 18-2 (Fachinformationszentrum Energie, Physik, Mathematik, GmbH, Karlsruhe, Germany, 1981), p. 65.

Moberg, W. L.

R. I. Frank, W. L. Moberg, J. Electrochem. Soc. 117, 524 (1970).
[CrossRef]

Morgan, R. L.

Morosanu, C.-E.

C.-E. Morosanu, Microelectron. Reliab. 20, 357 (1980).
[CrossRef]

C.-E. Morosanu, Thin Solid Films 65, 171 (1980).
[CrossRef]

Munkby, L.

P.-O. Nilsson, L. Munkby, Phys. Condens. Mater. 10, 290 (1969).

Niklasson, G. A.

Nilsson, P.-O.

P.-O. Nilsson, L. Munkby, Phys. Condens. Mater. 10, 290 (1969).

Philipp, H. R.

H. R. Philipp, J. Electrochem. Soc. 120, 295 (1973).
[CrossRef]

D. M. Brown, P. V. Gray, F. K. Heumann, H. R. Philipp, E. A. Taft, J. Electrochem. Soc. 115, 311 (1968).
[CrossRef]

Pliskin, W. A.

W. A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).
[CrossRef]

Salzberg, C. D.

Smirnova, T. P.

L. V. Khramova, T. P. Smirnova, B. M. Ayupov, V. I. Belyi, Neorg. Mater. 16, 1420 (1980)[Inorg. Mater. USSR 16, 973 (1981)].

Smith, D. R.

Szedon, J. R.

T. L. Chu, J. R. Szedon, C. H. Lee, J. Electrochem. Soc. 115, 318 (1968).
[CrossRef]

Taft, E. A.

E. A. Taft, J. Electrochem. Soc. 118, 1341 (1971).
[CrossRef]

D. M. Brown, P. V. Gray, F. K. Heumann, H. R. Philipp, E. A. Taft, J. Electrochem. Soc. 115, 311 (1968).
[CrossRef]

Tamminga, Y.

F. H. P. M. Habraken, A. E. T. Kuiper, Y. Tamminga, J. Appl. Phys. 53, 6996 (1982).
[CrossRef]

Villa, J. J.

Weaver, J. H.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, Part 2, Physics Data Vol. 18-2 (Fachinformationszentrum Energie, Physik, Mathematik, GmbH, Karlsruhe, Germany, 1981), p. 65.

Wolf, E.

M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975).

Yadav, A. D.

A. D. Yadav, M. C. Joshi, Thin Solid Films 91, 45 (1982).
[CrossRef]

Appl. Opt.

J. Appl. Phys.

C. G. Granqvist, A. Hjortsberg, J. Appl. Phys. 52, 4205 (1981).
[CrossRef]

F. H. P. M. Habraken, A. E. T. Kuiper, Y. Tamminga, J. Appl. Phys. 53, 6996 (1982).
[CrossRef]

J. Electrochem. Soc.

H. R. Philipp, J. Electrochem. Soc. 120, 295 (1973).
[CrossRef]

R. I. Frank, W. L. Moberg, J. Electrochem. Soc. 117, 524 (1970).
[CrossRef]

E. A. Taft, J. Electrochem. Soc. 118, 1341 (1971).
[CrossRef]

T. L. Chu, J. R. Szedon, C. H. Lee, J. Electrochem. Soc. 115, 318 (1968).
[CrossRef]

D. M. Brown, P. V. Gray, F. K. Heumann, H. R. Philipp, E. A. Taft, J. Electrochem. Soc. 115, 311 (1968).
[CrossRef]

J. Opt. Soc. Am.

J. Vac. Sci. Technol.

W. A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).
[CrossRef]

Microelectron. Reliab.

C.-E. Morosanu, Microelectron. Reliab. 20, 357 (1980).
[CrossRef]

Neorg. Mater.

L. V. Khramova, T. P. Smirnova, B. M. Ayupov, V. I. Belyi, Neorg. Mater. 16, 1420 (1980)[Inorg. Mater. USSR 16, 973 (1981)].

Phys. Condens. Mater.

P.-O. Nilsson, L. Munkby, Phys. Condens. Mater. 10, 290 (1969).

Phys. Status Solidi A

F. L. Edelman, Phys. Status Solidi A 51, 375 (1979).
[CrossRef]

Thin Solid Films

A. D. Yadav, M. C. Joshi, Thin Solid Films 91, 45 (1982).
[CrossRef]

C.-E. Morosanu, Thin Solid Films 65, 171 (1980).
[CrossRef]

Other

C. G. Granqvist, A. Hjortsberg, T. S. Eriksson, in Solar World Forum, D. O. Hall, J. Morton, Eds. (Pergamon, Oxford, 1982), Vol. 1, p. 562;Thin Solid Films 90, 187 (1982).

T. S. Eriksson, A. Hjortsberg, C. G. Granqvist, in Proceedings, Seventh International Conference on Vacuum Metallurgy: Metallurgical Coatings (Iron and Steel Institute of Japan, Japan Institute of Metals, Vacuum Society of Japan, Tokyo, 1982), p. 696.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, Part 2, Physics Data Vol. 18-2 (Fachinformationszentrum Energie, Physik, Mathematik, GmbH, Karlsruhe, Germany, 1981), p. 65.

M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975).

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Figures (3)

Fig. 1
Fig. 1

RBS spectrum of an evaporated SiO0.6N0.2 film on Be. The measurement configuration is sketched in the inset. The horizontal scale corresponds to 5.2 keV/channel.

Fig. 2
Fig. 2

Spectral reflectance and transmittance of evaporated SiO0.6N0.2 films on two different substrates. The measurement configurations are shown in the insets.

Fig. 3
Fig. 3

Real and imaginary parts of the complex dielectric function for evaporated SiO0.6N0.2 films in the thermal spectral range. Solid curves represent best data, shaded regions signify estimated uncertainties, solid dots indicate results obtained by Kramers-Kronig analysis, and the dotted line shows a linear extrapolation toward zero frequency.

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