Optical properties of narrowband spectral filter coatings related to layer structure and preparation

D. R. Gibson; P. H. Lissberger

doi:10.1364/AO.22.000269

Applied Optics
Vol. 22,
Issue 2,
pp. 269-281
(1983)
•https://doi.org/10.1364/AO.22.000269

Optical properties of narrowband spectral filter coatings related to layer structure and preparation

D. R. Gibson and P. H. Lissberger

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D. R. Gibson and P. H. Lissberger, "Optical properties of narrowband spectral filter coatings related to layer structure and preparation," Appl. Opt. 22, 269-281 (1983)

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Abstract

The optical properties of thirty-five all-dielectric spectral filter coatings for the visible spectrum have been investigated and correlated with the deposition conditions of the constituent layers of cryolite and zinc sulfide and with the processes which occur when the coatings are exposed to atmosphere. It will be shown that the results of measurements of transmittance and reflectance over the passband wavelengths can be predicted theoretically only if account is taken of absorption in the layers and scattering at the rough boundaries and of changes in the refractive indices of the layers due to water penetration.

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Type	Design		Predicted HBW (nm)
Type	Design		λ_D = 546.1 nm	λ_D = 589.0 nm
$U_{z}^{-}, C_{z}^{-}, H_{z}^{-}$	Air \|(HL)⁴8H(LH)⁴\| glass		0.70	0.82
$U_{z}^{+}, C_{z}^{+}, H_{z}^{+}$	Air \|(HL)⁴8H(LH)⁴L\| glass		0.60	0.70
$C_{c}^{+}$	Air \|(HL)⁴H4LH(LH)⁴L\| glass		0.58	0.64
Notation
U, uncooled		H, ZnS quarterwave layer
C, cooled		L, cryolite quarterwave layer
H, heated
+(superscript), with AR coating		z(subscript), with ZnS spacer
−(superscript), with AR coating		c(subscript), with cryolite spacer

Type			Result	References
Thickness errors			δλ	16–18
Refractive-index errors
symmetric	}	w.r.t. the spacer	δB	19
asymmetric	}	w.r.t. the spacer	δB, δT(R)
post deposition			δλ +
Absorption			δB, δT(R,H)	4–6
Interfacial roughness			δB, δT(R,S)	1, 2, 20, 21
Lack of coherence
spatial			δλ, δB δT(R)	3, 22, 23
spectral			δB, δT(R)	24, 25
Notation
δλ, wavelength shift of peak transmittance			δT, transmittance loss into: (R) reflectance,
δB, increase in bandwidth			(H) heat, (S) scatter

Measured optical function	Filter stabilized		Instrument
Measured optical function	In vacuo	In air	Instrument
Transmittance	✓	✓	Spectrophotometer
Reflectance		✓	Spectrophotometer
Absorptance		*	Tunable laser calorimeter
Scatter		*	Tunable laser scatterometer
Wavelength shift of peak transmittance (δλ)	✓	✓	Spectrophotometer
Half-bandwidth (B)	✓	✓	Spectrophotometer

DVM Reading Number	State
	Shutter position					Specimen position

	1	2		3	4	H	V
1	0	1		1	0	1	0
2	0	1		0	1	1	0
3	1	0		1	0	1	0
4	1	0		0	1	1	0
5	0	1		1	0	0	0
6	0	1		0	1	0	1
7	1	0		1	0	0	1
8	1	0		0	1	0	0
Notation
0, shutter out of beam			H ⊕ V = 1, specimen in, comparator out
1, shutter in beam			H ⊕ V = 0, specimen out, comparator in
A change from 0 to 1 or vice versa in H or V represents a π rotation of the specimen holder about the horizontal or vertical axis, respectively.

Type	No.	Design wave length λ_D (nm)	Substrate temp. (°C)	Stabilized λ_max − λ_D (nm)^a		Wavelength Shift δλ_w = δλ_A − δλ_υ (nm)		Transmittance loss (1 − T) (at λ_max)		Reflectance R(at λ_max)		rms roughness σ(nm)	Half bandwidth (nm)
				Stabilized λ_max − λ_D (nm)^a		Wavelength Shift δλ_w = δλ_A − δλ_υ (nm)		Transmittance loss (1 − T) (at λ_max)		Reflectance R(at λ_max)			In vacuo		In air
				In vacuoδλ_υ	In air δλ_A	Measured	Theoretical	Measured	Theoretical	Measured	Theoretical		Measured	Theoretical	Measured	Theoretical
$U_{z}^{-}$	5	546.1						0.250	0.252	0.112	0.107		0.92	0.90	1.00	0.97
				−0.67	0.75			±0.011		±0.012			±0.04		±0.03
$U_{z}^{-}$	3	589.0		±0.14^M	±0.22^M			0.242	0.239	0.108	0.099		0.95	0.93	1.02	0.99
			65			1.45	1.21	±0.010		±0.014		0.212	±0.04		±0.06
$U_{z}^{+}$	6	546.1				±0.05		0.254	0.254	0.089	0.088	±0.009	0.73	0.71	0.78	0.78
				−0.66	0.81			±0.004		±0.012			±0.03		±0.02
$U_{z}^{+}$	3	589.0		±0.07	±0.14			0.247	0.242	0.086	0.083		0.76	0.80	0.80	0.84
								±0.008		±0.009			±0.03		±0.02
$C_{z}^{-}$	3	546.1						0.214	0.222	0.078	0.083		0.93	0.85	0.96	0.95
								±0.011		±0.010			±0.04		±0.04
$C_{z}^{-}$	1	589.0						0.205	0.203	0.073	0.075		0.95	0.90	0.98	0.97
			42	−0.25	1.68	1.93						0.186
$C_{z}^{+}$	4	546.1		±0.07	±0.12	±0.05		0.210	0.223	0.060	0.062	±0.007	0.78	0.76	0.85	0.83
								±0.011		±0.012			±0.03		±0.04
$C_{z}^{+}$	1	589.0						0.208	0.210	0.052	0.051		0.80	0.78	0.89	0.89
$H_{z}^{-}$	2	589.0						0.353	0.351	0.148	0.137		1.07	1.03	1.07	1.03
			150	−1.67	−1.67	0.00		±0.018		±0.031		0.357	±0.12		±0.12
$H_{z}^{+}$	3	589.0		±0.04	±0.04			0.362	0.359	0.129	0.133	±0.010	0.89	0.87	0.89	0.87
								±0.018		±0.017			±0.07		±0.07
$C_{c}^{+}$	4	589.0	27	−0.18	7.33	7.51		0.166^υ	0.168		0.034	0.168	0.65	0.70
				±0.06	±0.54	±0.33		±0.009					±0.02

Abstract

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Figures (14)

Tables (5)

Equations (19)

Applied Optics