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References

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  1. R. A. Jones, Appl. Opt. 16, 218 (1977).
    [CrossRef] [PubMed]
  2. R. A. Jones, Opt. Eng. 18, 390 (1979).

1979

R. A. Jones, Opt. Eng. 18, 390 (1979).

1977

Jones, R. A.

R. A. Jones, Opt. Eng. 18, 390 (1979).

R. A. Jones, Appl. Opt. 16, 218 (1977).
[CrossRef] [PubMed]

Appl. Opt.

Opt. Eng.

R. A. Jones, Opt. Eng. 18, 390 (1979).

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Figures (3)

Fig. 1
Fig. 1

Block diagram of the CCP simulation program—LOFS.

Fig. 2
Fig. 2

CCP correlation efficiency curves for two tool configurations.

Fig. 3
Fig. 3

Contour maps of the surface figure error for a test case (A) before polishing and (B) predicted after polishing with maps (C)–(E) representing intermediate states.

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