Abstract

In a polishing process the wear is greater at the edge when the tool extends beyond the border of the workpiece. To explain this effect, we propose a new model in which the pressure is higher at the edge. This model is applied to the case of a circular tool that polishes a circular workpiece. Our model correctly predicts that a greater amount of material is removed from the edge of the workpiece.

© 2004 Optical Society of America

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