Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Testing refractive silicon microlenses by use of a lateral shearing interferometer in transmission

Not Accessible

Your library or personal account may give you access

Abstract

Wave aberrations of refractive photoresist microlenses and silicon microlenses were measured with a lateral shearing interferometer. Because of the silicon elements, a near-infrared working wavelength (λ = 1.32 μm) was used. The wave front was evaluated by a phase step technique with four steps. Integration of the phase distributions was performed with a computationally efficient Fourier transformation algorithm. The influence of the detector vidicon nonlinearity on the measured wave front was calculated. The defocusing behavior of the interferometer was investigated by fitting the measured wave fronts with the help of Zernike circle polynomials. It is shown that the reproducibility can be kept below λ/100 rms. Examples for the measured wave fronts of plano–convex silicon microlenses are discussed in detail.

© 1998 Optical Society of America

Full Article  |  PDF Article
More Like This
Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer

G. W. R. Leibbrandt, G. Harbers, and P. J. Kunst
Appl. Opt. 35(31) 6151-6161 (1996)

Analysis of lateral shearing interferograms by use of Zernike polynomials

G. Harbers, P. J. Kunst, and G. W. R. Leibbrandt
Appl. Opt. 35(31) 6162-6172 (1996)

Non-null testing of the aspheric surface using a quadriwave lateral shearing interferometer

Rui Zhang, Yongying Yang, Hongyang Zhao, Zijian Liang, Shengan Liu, and Jian Bai
Appl. Opt. 59(18) 5447-5456 (2020)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (14)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved