Abstract
A systematic noise-analysis study for optimizing data collection and data processing parameters for through-focus scanning optical microscopy (TSOM) is presented. TSOM is a three-dimensional shape metrology method that can achieve sub-nanometer measurement sensitivity by analyzing sets of images acquired through focus using a conventional optical microscope. We show that the best balance between signal-to-noise performance and acquisition time can be achieved by judicious spatial averaging. Correct background-signal subtraction of the imaging system inhomogeneities is also critical, as well as careful alignment of the constituent images in the case of differential TSOM analysis.
© 2016 Optical Society of America
Full Article | PDF ArticleMore Like This
Ravi Kiran Attota and Hyeonggon Kang
Opt. Express 24(13) 14915-14924 (2016)
Ravi Kiran Attota and Haesung Park
Opt. Lett. 42(12) 2306-2309 (2017)
Ravi Kiran Attota, Peter Weck, John A. Kramar, Benjamin Bunday, and Victor Vartanian
Opt. Express 24(15) 16574-16585 (2016)