Abstract
Waveguide Bragg gratings were fabricated by plasma-enhanced chemical-vapor deposition followed by irradiation with KrF excimer laser light through a phase mask. The period of the Bragg grating was , and the Bragg wavelength was . The temperature dependence of the Bragg wavelength was for a core waveguide on a Si substrate, and the Bragg wavelength shift was successfully reduced to by use of a core and a crystallized glass substrate with a thermal-expansion coefficient of .
© 2002 Optical Society of America
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