Abstract
Mo/Y multilayer mirrors were deposited by dc magnetron sputtering under different deposition conditions. They were characterized by reflectance measurements at normal and grazing angles of incidence, by transmission electron microscopy, and by Auger depth profiling. Normal-incidence peak reflectances of 34% and 22% were measured at wavelengths of 11.5 and 8.1 nm, respectively. Interface roughness and contamination of the layers during deposition limit the peak reflectance of these Mo/Y mirrors.
© 1994 Optical Society of America
Full Article | PDF ArticleMore Like This
Claude Montcalm, Brian T. Sullivan, M. Ranger, J. M. Slaughter, Patrick A. Kearney, Charles M. Falco, and M. Chaker
Opt. Lett. 19(13) 1004-1006 (1994)
Benjawan Sae-Lao and Claude Montcalm
Opt. Lett. 26(7) 468-470 (2001)
Claude Montcalm, Brian T. Sullivan, Sophie Duguay, M. Ranger, W. Steffens, Henri Pépin, and M. Chaker
Opt. Lett. 20(12) 1450-1452 (1995)