Abstract

Continuous surface-relief phase gratings for two-dimensional (2-D) array generation have been realized by laser-beam writing lithography. For a 9 × 9 fan-out element, a diffraction efficiency of 94% and a uniformity of better than ±8% have been achieved. These are, to our knowledge, the best published results for 2-D surface-relief fan-out elements. Separable and nonseparable solutions for the design of 2-D fan-out elements are discussed.

© 1992 Optical Society of America

Continuous-relief diffractive optical elements for two-dimensional array generation

Michael T. Gale, Markus Rossi, Helmut Schütz, Peter Ehbets, Hans Peter Herzig, and Damien Prongué
Appl. Opt. 32(14) 2526-2533 (1993)

Optimized kinoform structures for highly efficient fan-out elements

D. Prongué, H. P. Herzig, R. Dändliker, and M. T. Gale
Appl. Opt. 31(26) 5706-5711 (1992)

Binary surface-relief gratings for array illumination in digital optics

Antti Vasara, Mohammad R. Taghizadeh, Jari Turunen, Jan Westerholm, Eero Noponen, Hiroyuki Ichikawa, J. Michael Miller, Tommi Jaakkola, and Sirpa Kuisma
Appl. Opt. 31(17) 3320-3336 (1992)

Electromagnetic scattering of two-dimensional surface-relief dielectric gratings

Soon Ting Han, Yuh-Luen Tsao, Rodger M. Walser, and Michael F. Becker
Appl. Opt. 31(13) 2343-2352 (1992)

Dielectric surface-relief gratings with high diffraction efficiency

Kiyoshi Yokomori
Appl. Opt. 23(14) 2303-2310 (1984)