Abstract

A judicious selection of polymer materials for the fabrication of a deformable-membrane light modulator (e.g., the photoemitter membrane light modulator) will enhance its speed. A polymer with a low surface energy decreases the device response time by lowering the membrane tension that is caused by the surface interaction between the membrane and an adjacent dielectric surface. The material must also have high temperature stability. A composite structure of parylene on poly[bis(trifluoroethoxy)phosphazene] on SiO_x is found to meet these requirements, with stability to 220°C and a tension of 0.18 N/m, giving a potential frame rate of close to 10 kHz or a throughput of >10¹⁰ pixels/sec.

© 1990 Optical Society of America

Experimental parameters of the photoemitter membrane spatial light modulator

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