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How errors in sputtering the layers affect the spectral response of a multilayer interference filter

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Abstract

An interference filter based on Nb2O5 and SiO2 is designed for coarse-wavelength multiplexing devices. Studies are carried out concerning how errors in sputtering the layers affect the spectral response of the filter. The layers that are most sensitive to errors and the allowable error of sputtering the coating are determined. The possibility of correcting the allowed errors during the deposition of the interference layers of the filter is evaluated. The sputtering errors are analyzed for a sample filter obtained experimentally. © 2004 Optical Society of America

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