Abstract

We present a silicon-on-insulator microring resonator-based refractive index sensor with enhanced sensitivity and measurement range. Both improvements are achieved by integrating a 1D photonic crystal inside the microring waveguide. A photonic crystal is formed by periodically patterning, partially etching the rectangular perforations. Sensor performance is numerically analyzed for various combinations of perforation depth and length, each of which maintains a constant resonance wavelength. Our findings show that, while deeper perforations result in a larger bulk refractive index sensitivity, the optimal design exhibiting the smallest limit of detection can be obtained at some intermediate value, depending on the leading term in sensor resolution. In addition to theoretical analysis, we present an experimental demonstration of a fabricated microring resonator with 120 nm height perforations.

© 2017 Optical Society of America

High sensitivity and enhanced measurement range biosensing based on defective photonic crystal microring resonators

Jin-Yue Su, Xun-Qiang Huang, Han-Lei Xu, Jin-Yun Zhou, and Zi-Ming Meng
J. Opt. Soc. Am. B 39(10) 2831-2839 (2022)

Photonic crystal concentric dual-microring resonator for refractive index sensing

Bingyao Shi, Xiao Chen, Yuanyuan Cai, Qi Kang, and Yiquan Wang
J. Opt. Soc. Am. B 40(9) 2462-2469 (2023)

Photonic crystal microring resonator for label-free biosensing

Stanley M. Lo, Shuren Hu, Girija Gaur, Yiorgos Kostoulas, Sharon M. Weiss, and Philippe M. Fauchet
Opt. Express 25(6) 7046-7054 (2017)

Single-slot hybrid microring resonator hydrogen sensor

Kenan Cicek, Mustafa Eryürek, and Alper Kiraz
J. Opt. Soc. Am. B 34(7) 1465-1470 (2017)

Integrated label-free optical biochemical sensor with a large measurement range based on an angular grating-microring resonator

Tao Ma, Lei Sun, Jinhui Yuan, Xinzhu Sang, Binbin Yan, Kuiru Wang, and Chongxiu Yu
Appl. Opt. 55(18) 4784-4790 (2016)