Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Theoretical Treatment of Ellipsometry

Not Accessible

Your library or personal account may give you access

Abstract

Exact expressions are obtained in closed form for the phase and amplitude of the reflected light when a light beam is incident upon a multilayer of a number of homogeneous media. The assumption is made that Maxwell’s equations and Ohm’s law hold. These equations are applied to the special case of dielectric coated metals and the results are compared to ellipsometry measurements made in chromium slides covered with barium stearate films of known thickness. When the conductivity and the dielectric constant of the metal are allowed to assume complex values, and when precautions are taken to reduce the inaccuracy introduced by the residual oxide and gas layer on the metal, the agreement is good.

© 1962 Optical Society of America

Full Article  |  PDF Article
More Like This
Simplified Treatment of Ellipsometry

Joseph A. Faucher, George M. McManus, and Hans J. Trurnit
J. Opt. Soc. Am. 48(1) 51-54 (1958)

General Treatment of the Effect of Cell Windows in Ellipsometry*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 61(6) 773-776 (1971)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (38)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved