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Measurement of Submicron Circular Apertures by Scanning Microscopy

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Abstract

Experiments are described in which submicron circular apertures of known diameter in an opaque aluminum film are scanned under different conditions. The effects of varying the numerical aperture, focus, and tube length of the scanning objective and the wavelength and polarization of the light used are noted.

The use of two different sizing parameters in automatic high-resolution scanning microscopy is discussed.

© 1959 Optical Society of America

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