Abstract
In this study, an innovative design for porous silicon (PSi) based sensors
is proposed to eliminate some problems of conventional PSi sensors such as
undesired reflections from imprecise positioning of the fiber optic cable
and the PSi structure. Our design has three stages as hole milling for fiber
socket, fabrication of filter structure, and integration of the fiber optic
cable to the bulk Si. We have carried out reflectivity measurements of alcohols
with close refractive index values by the proposed and conventional sensors.
From the measurements, we note that both sensors have equal sensitivity in
identifying alcohols, that repeatability of our proposed sensor is relatively
higher, and that our sensor allows easy positioning and flexibility in sensing
applications. Nonetheless, our proposed sensor necessitates a thorough fabrication
process and a methodological preparation.
© 2012 IEEE
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