Abstract
In this study, an improved phase-shifting diffraction interferometer for
measuring the surface topography of a microsphere is developed. A common diode-pumped
solid state laser is used as the light source to facilitate apparatus realization, and a
new polarized optical arrangement is designed to filter the bias light for
phase-shifting control. A pinhole diffraction self-calibration method is proposed to
eliminate systematic errors introduced by optical elements. The system has an adjustable
signal contrast and is suitable for testing the surface with low reflectivity. Finally,
a spherical ruby probe of a coordinate measuring machine is used as an example tested by
the new phase-shifting diffraction interferometer system and the WYKO scanning white
light interferometer for experimental comparison. The measured region presents
consistent overall topography features, and the resulting peak-to-valley value of
84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with
the manufacturer’s specification value.
© 2016 Chinese Laser Press
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