Abstract

We report on the design, properties, and applications of a high-resolution and wide-bandwidth light intensity fiber optic displacement sensor for microelectromechanical system (MEMS) metrology. There are two types of structures that the system is dedicated to: vibrating with both high and low frequencies. In order to ensure high-frequency and high-resolution measurements, frequency down mixing and selective signal processing were applied. The obtained effective measuring bandwidth ranges from single hertz to 1 megahertz. The achieved resolution presented here is $116\mathrm{pm}/{\mathrm{Hz}}^{1/2}$ and $138\mathrm{pm}/{\mathrm{Hz}}^{1/2}$ for low-frequency and high-frequency operation modes, respectively, whereas the measurement of static displacement is 100 μm.

© 2016 Optical Society of America

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