Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Fourier domain optical tool normalization for quantitative parametric image reconstruction

Not Accessible

Your library or personal account may give you access

Abstract

There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer-scale changes has been observed when measuring critical dimensions of subwavelength 20 nm features or when imaging defects below 15 nm using angle-resolved and focus-resolved optical data. However, these methods inherently involve complex imaging optics and analysis of complicated three-dimensional electromagnetic fields. This paper develops a new approach to enable the rigorous analysis of three-dimensional, through-focus, or angle-resolved optical images. We use rigorous electromagnetic simulation with enhanced Fourier optical techniques, an approach to optical tool normalization, and statistical methods to evaluate sensitivities and uncertainties in the measurement of subwavelength three-dimensional structures.

© 2013 Optical Society of America

Full Article  |  PDF Article
More Like This
Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy

Bryan M. Barnes, Martin Y. Sohn, Francois Goasmat, Hui Zhou, András E. Vladár, Richard M. Silver, and Abraham Arceo
Opt. Express 21(22) 26219-26226 (2013)

Scatterfield microscopy for extending the limits of image-based optical metrology

Richard M. Silver, Bryan M. Barnes, Ravikiran Attota, Jay Jun, Michael Stocker, Egon Marx, and Heather J. Patrick
Appl. Opt. 46(20) 4248-4257 (2007)

Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach

Nien Fan Zhang, Richard M. Silver, Hui Zhou, and Bryan M. Barnes
Appl. Opt. 51(25) 6196-6206 (2012)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved