Abstract

Based on measuring one-dimensional small rotation angles by using a parallel interference pattern (PIP), a method for measuring two-dimensional (2D) small rotation angles by using two different PIP’s that are orthogonal to each other is proposed. We simultaneously measure the 2D small rotation angles Δθ and Δϕ by detecting the phases of the orthogonal PIP’s reflected by an object at two detection points. A sensitivity of 4.9 mrad/arcsec and a spatial resolution of 1.5 × 1.5 mm² are achieved in the measurement. Theoretical analysis and experimental results show that error ɛ₁ in the measurement of Δϕ is almost equal to −0.01Δθ and error ɛ₂ in the measurement of Δθ is almost equal to −0.01Δϕ. For small rotation angles of less than a few tens of arcseconds, the random errors whose standard deviations are 0.6 arcsec are dominant.

© 1996 Optical Society of America

Measurement of small rotation angles by using a parallel interference pattern

Xiaoli Dai, Osami Sasaki, John E. Greivenkamp, and Takamasa Suzuki
Appl. Opt. 34(28) 6380-6388 (1995)

High accuracy, wide range, rotation angle measurement by the use of two parallel interference patterns

Xiaoli Dai, Osami Sasaki, John E. Greivenkamp, and Takamasa Suzuki
Appl. Opt. 36(25) 6190-6195 (1997)

Measurement of two-dimensional small angle deviation with a prism interferometer

Sanjib Chatterjee and Y. Pavan Kumar
Appl. Opt. 47(27) 4900-4906 (2008)

External right-angle measurement using a two-autocollimator system

Yun He, Qi Liu, Jing Jing He, Zhi Jie He, Ze Zhu Hu, Hui Zong Duan, and Hsien Chi Yeh
Appl. Opt. 58(4) 1158-1163 (2019)

Design, fabrication, and verification of a three-dimensional autocollimator

Yanhe Yin, Sheng Cai, and Yanfeng Qiao
Appl. Opt. 55(35) 9986-9991 (2016)