Platinum/carbon multilayer reflectors for soft-x-ray optics

G. S. Lodha; K. Yamashita; T. Suzuki; I. Hatsukade; K. Tamura; T. Ishigami; S. Takahama; Y. Namba

doi:10.1364/AO.33.005869

Applied Optics
Vol. 33,
Issue 25,
pp. 5869-5874
(1994)
•https://doi.org/10.1364/AO.33.005869

Platinum/carbon multilayer reflectors for soft-x-ray optics

G. S. Lodha, K. Yamashita, T. Suzuki, I. Hatsukade, K. Tamura, T. Ishigami, S. Takahama, and Y. Namba

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
G. S. Lodha, K. Yamashita, T. Suzuki, I. Hatsukade, K. Tamura, T. Ishigami, S. Takahama, and Y. Namba, "Platinum/carbon multilayer reflectors for soft-x-ray optics," Appl. Opt. 33, 5869-5874 (1994)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We have fabricated platinum/carbon (Pt/C) multilayer reflectors with 2d spacaings between 50 and 200 Å, using an electron-beam evaporator. We investigated the effects of 2d values, the number of layer pairs, substrate temperature, coatings, and the long-term stability on the reflectivity performance by using characteristic x rays and monochromatized synchrotron radiation in the 0.8–8-keV region. In this study we show that Pt/C multilayers with 10–20 layer pairs exhibit high and stable soft-x-ray reflectivity. The interfacial roughness was measured in the range of 5 Å and becomes lower for structures deposited at liquid-nitrogen temperatures. Coating these reflectors with a 100-Å-thick platinum layer increased the grazing angle reflectivity without significantly lowering the Bragg peak reflectivity.

Full Article | PDF Article

More Like This

Soft x-ray platinum-carbon multilayer mirrors

Brian L. Evans and Barry J. Kent
Appl. Opt. 26(20) 4491-4497 (1987)

Performance of Co/Ti multilayers in a water window soft x-ray regime

Piyali Sarkar, Arup Biswas, Rajnarayan De, K. Divakar Rao, Subir Ghosh, M. H. Modi, Siju John, H. C. Barshilia, Dibyendu Bhattacharyya, and Naba Kishor Sahoo
Appl. Opt. 56(27) 7525-7532 (2017)

Characterization of sputtered nickel/carbon multilayers with soft-x-ray reflectivity measurements

J. Friedrich, I. Diel, C. Kunz, S. Di Fonzo, B. R. Müller, and W. Jark
Appl. Opt. 36(25) 6329-6334 (1997)

Previous Article Next Article

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Sample ID	Sample	N	Substrate	Substrate Temp. (K)	Thickness Ratio (Pt/C)	2d Fit	First-Order Peak Ref. (%)				Roughness (σ_i) 8.34 Å
							Cu-K_α		Al-K_α

							Cal.	Fit	Cal.	Fit
1.1	Pt/C	14	FG	80	1:2	207	83.42	77.6	50.8	47.3	3.8
1.2	Pt/C	8	FG	80	1:2	128	72.3	59.8	37.9	31.1	4.2
1.3	Pt/C + Pt^a	10	FG	80	1:2	109	53.13	39.4	22.5	16.9	4.4
1.4	Pt/C + Au^b	10	FG	80	1:2	109	42.63	31.4	11.8	8.9	5.0
1.5	Pt/C	10	FG	80	1:2	105	73.4	55.1	39.4	30.4	4.0
1.6	Pt/C	15	FG	80	1:2	78.8	64.0	38.2	34.3	24.3	3.7
1.7	Pt/C	25	FG	80	1:2	60.0	63.2	25.6	32.6	13.6	4.5
2.1	Pt/C	12	FG	300	1:2	149	83.4	50.0	52.5	41.0	5.5
2.2	Pt/C	10	FG	300	1:2	144	81.8	59.6	50.3	39.3	5.0
2.3	Pt/C	5	FG	300	1:2	144	74.2	52.5	43.2	38.1	5.5
2.4	Pt/C	15	FG	300	1:2	136	72.2	57.5	45.2	33.1	5.5
2.5	Pt/C	5	FG	300	1:2	125	56.5	35.7	28.0	18.3	5.3
2.6	Pt/C	10	FG	300	1:2	124	74.5	56.0	40.1	27.7	5.4
2.7	Pt/C	10	FG	300	1:2	106.5	71.4	44.4	41.5	30.4	4.8
2.8	Pt/C	15	FG	300	1:2	103	76.3	52.8	43.8	29.5	4.5
2.9	Pt/C	10	FG	300	1:2	102	67.2	44.9	35.7	23.4	5.0
2.10	Pt/C	10	FG	300	1:2	102	72.2	43.9	41.5	27.0	4.6
2.11	Pt/C	10	FG	300	1:2	102	72.2	46.3	41.5	26.7	5.2
2.12	Pt/C	10	FG	300	1:2	102	71.3	54.4	46.5	28.1	5.2
2.13	Pt/C	5	FG	300	1:2	98.6	33.4	21.6	16.4	11.0	4.5
2.14	Pt/C	15	FG	300	1:2	83.0	68.6	44.4	37.6	20.5	5.0
2.15	Pt/C	15	FG	300	1:1	78.5	65.0	31.3	32.1	14.7	5.2
2.16	Pt/C	20	FG	300	1:2	66.8	65.2	21.3	32.6	8.8	6.0
2.17	Pt/C	20	Si	300	1:2	62.8	57.3	18.6	28.9	9.8	5.0
2.18	Pt/C	15	FG	300	1:2	56.0	34.1	4.5	15.3	2.0	6.3
3.1	Pt/C	5	FG	375	1:2	53.2	4.5	1.6	2.1	0.8	5.1
3.2	Pt/C	10	FG	375	1:2	58.8	19.4	6.5	9.8	2.9	5.7
3.3	Pt/C	15	FG	375	1:2	60.8	40.0	11.3	19.3	5.5	5.5

Abstract

Cited By

Figures (6)

Tables (1)

Equations (1)

Applied Optics