Soft x-ray reflection from SiC, TiC, and WC mirrors

Mihiro Yanagihara; Michio Niwano; Tsuneharu Koide; Shigeru Sato; Tsuneaki Miyahara; Yasuo Iguchi; Shigeo Yamaguchi; Taizo Sasaki

doi:10.1364/AO.25.004586

Applied Optics
Vol. 25,
Issue 24,
pp. 4586-4590
(1986)
•https://doi.org/10.1364/AO.25.004586

Soft x-ray reflection from SiC, TiC, and WC mirrors

Mihiro Yanagihara, Michio Niwano, Tsuneharu Koide, Shigeru Sato, Tsuneaki Miyahara, Yasuo Iguchi, Shigeo Yamaguchi, and Taizo Sasaki

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Mihiro Yanagihara, Michio Niwano, Tsuneharu Koide, Shigeru Sato, Tsuneaki Miyahara, Yasuo Iguchi, Shigeo Yamaguchi, and Taizo Sasaki, "Soft x-ray reflection from SiC, TiC, and WC mirrors," Appl. Opt. 25, 4586-4590 (1986)

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Abstract

The optical constants of SiC, TiC, and WC in the soft x-ray region (80–1200 eV) derived from the incidence-angle dependence of the specular reflectance are reported. The angular dependence of the specular intensity can be explained by simple scattering theory with a Gaussian distribution of the surface roughness in the soft x-ray wavelength range.

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E (eV)	δ = 1 − n	k	σ(Å)
80	0.0337	1.28 E-2	33.8
100	0.00718	4.09 E-3	18.1
120	0.00753	1.58 E-2	28.3
150	0.0116	1.39 E-2	28.0
200	0.00934	6.47 E-3	27.5
250	0.00729	5.03 E-3	29.6

350	0.00488	2.33 E-3	22.9
500	0.00253	6.45 E-4	18.0
700	0.00129	2.06 E-4	15.0
1000	0.00062	4.30 E-5	17.2

E (eV)	δ = 1 − n	k	σ(Å)
80	0.0772	2.90 E-2	15.0
100	0.0466	1.62 E-2	13.0
120	0.0328	1.64 E-2	15.0
150	0.0217	7.17 E-3	13.3
200	0.0126	4.11 E-3	12.5
250	0.00746	2.09 E-3	12.0
320	0.00195	1.20 E-3	12.5
360	0.00207	1.12 E-3	13.9
400	0.00187	8.80 E-4	12.5
500	0.00222	1.63 E-3	10.0
600	0.00198	1.12 E-3	11.7
700	0.00177	8.10 E-4	11.4
800	0.00147	5.98 E-4	11.3

E (eV)	δ = 1 − n	k	σ(Å)
300	0.00221	1.84 E-3	20.0
400	0.00232	1.96 E-3	20.0
600	0.00326	2.00 E-3	25.0
800	0.00236	1.02 E-3	25.0
1000	0.00148	5.73 E-4	21.3
1200	0.000954	4.57 E-4	12.8

E (eV)	δ = 1 − n	k	σ(Å)
80	0.0337	1.28 E-2	33.8
100	0.00718	4.09 E-3	18.1
120	0.00753	1.58 E-2	28.3
150	0.0116	1.39 E-2	28.0
200	0.00934	6.47 E-3	27.5
250	0.00729	5.03 E-3	29.6

350	0.00488	2.33 E-3	22.9
500	0.00253	6.45 E-4	18.0
700	0.00129	2.06 E-4	15.0
1000	0.00062	4.30 E-5	17.2

E (eV)	δ = 1 − n	k	σ(Å)
80	0.0772	2.90 E-2	15.0
100	0.0466	1.62 E-2	13.0
120	0.0328	1.64 E-2	15.0
150	0.0217	7.17 E-3	13.3
200	0.0126	4.11 E-3	12.5
250	0.00746	2.09 E-3	12.0
320	0.00195	1.20 E-3	12.5
360	0.00207	1.12 E-3	13.9
400	0.00187	8.80 E-4	12.5
500	0.00222	1.63 E-3	10.0
600	0.00198	1.12 E-3	11.7
700	0.00177	8.10 E-4	11.4
800	0.00147	5.98 E-4	11.3

Abstract

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Figures (5)

Tables (3)

Equations (3)

Applied Optics