Abstract

A direct phase measurement interferometer designed and constructed to operate at a 3.8-μm wavelength is described. The interferometer uses a deuterium fluoride laser as the light source, zinc selenide transmitting optics, and a 32- × 64-element PtSi infrared CCD detector array with digital processing electronics and a graphics display on a desktop microcomputer. The instrument, which is useful for measuring a figure error caused by thickness variations in dielectric coatings applied to infrared optics, gives a wave front measurement repeatability of <λ/50 rms.

© 1985 Optical Society of America

Multiple-wavelength phase-shifting interferometry

Yeou-Yen Cheng and James C. Wyant
Appl. Opt. 24(6) 804-807 (1985)

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Phase shifter calibration in phase-shifting interferometry

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