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Surface profile measurement with a dual-beam optical system

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Abstract

A system for the noncontact measurement of surface profiles is reported. Instead of measuring the absolute displacement profile, we measure its derivative, the velocity profile. This is done by measuring the difference in the focus errors between two laser spots. Data processing is then used to recover the displacement information. The system has demonstrated sensitivities of the order of nanometers on soft plastic surfaces. It also permits the real-time measurement of surface profiles in dynamic conditions. Thus it has special applicability to magnetic and optical disks. Results of measurements on several substrates are described.

© 1984 Optical Society of America

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