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Sub-Wavelength EUV Imaging with 12.6nm Spatial Resolution Employing 13.5nm High Harmonic Beams

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Abstract

We demonstrate a record sub-wavelength 12.6nm spatial resolution for EUV imaging using 13.5nm illumination from a high-harmonic light source. Modulus enforced probe ptychographic coherent diffractive imaging allows for large-field quantitative imaging of near-periodic objects.

© 2016 Optical Society of America

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