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Sandwich microstrip lines with polymer dielectric for high-speed on-chip interconnects

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Abstract

Polymer-based sandwich microstrip transmission lines are investigated for the use as ultrafast interconnects in microelectronic circuits. Electronic-grade Benzocy-clobutene (Cyclotene) is applied as dielectric medium. Optoelectronic pulse-propagation measurements comparing the microstrip lines with standard coplanar waveguides show that the waveguides are free of modal dispersion up to the highest frequencies of 1.2 THz. Signal attenuation is low (≤1 dB/mm at 0.1 THz, ≈ 6 dB/mm at 1.2 THz), dominated by conductor losses. Radiation losses are negligible for all sandwich microstrip lines tested. Shielding by the ground conductor ensures that the waveguides are immune against Drude absorption in lossy substrates.

© 1997 Optical Society of America

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