A Method to Calculate the Peak Value of the Material Remove Rate of Ion Beam Figuring

Tang Wa; Tang Wa; Deng Weijie; Zheng Ligong; Zhang Xuejun

doi:10.1364/SUMSESSION.2013.Tu10

2013 CIOMP-OSA Summer Session on Optical Engineering, Design and Manufacturing
(Optica Publishing Group, 2013),
paper Tu10
•https://doi.org/10.1364/SUMSESSION.2013.Tu10

A Method to Calculate the Peak Value of the Material Remove Rate of Ion Beam Figuring

Tang Wa, Deng Weijie, Zheng Ligong, and Zhang Xuejun

CIOMP-OSA Summer Session on Optical Engineering, Design and Manufacturing 2013

Changchun China
4–9 August 2013
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Tuesday, 6 August Poster Session (Tu)

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T. Wa, D. Weijie, Z. Ligong, and Z. Xuejun, "A Method to Calculate the Peak Value of the Material Remove Rate of Ion Beam Figuring," in 2013 CIOMP-OSA Summer Session on Optical Engineering, Design and Manufacturing, J. Rolland, J. Wyant, P. Chavel, X. Zhang, C. Wang, and Y. Bai, eds., (Optica Publishing Group, 2013), paper Tu10.

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Abstract

The material removal rate of ion beam figuring will vary with the changing of the working parameters of the ion beam source. The distribution of the ion beam is got by Faraday cup. The removal function of the ion beam is got by experiment. The peak value of the removal rate is calculated according to the relationship between scan results and the experiment results.

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