PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger; Paul Muellner; Stefan Nevlacsil; Moritz Eggeling; Alejandro Maese-Novo; Florian Vogelbacher; Martin Sagmeister; Jochen Kraft; Dana Seyringe; Sabine Trupp; Michael Henfling; Svenja Plesshoff; Jan Vaupot; Marcel Sladecek; Elisabet Rank; Wolfgang Drexler

doi:10.1364/SENSORS.2020.STh4G.1

Optical Sensors and Sensing Congress
OSA Technical Digest (Optica Publishing Group, 2020),
paper STh4G.1
•https://doi.org/10.1364/SENSORS.2020.STh4G.1

PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger, Paul Muellner, Stefan Nevlacsil, Moritz Eggeling, Alejandro Maese-Novo, Florian Vogelbacher, Martin Sagmeister, Jochen Kraft, Dana Seyringe, Sabine Trupp, Michael Henfling, Svenja Plesshoff, Jan Vaupot, Marcel Sladecek, Elisabet Rank, and Wolfgang Drexler

Optical Sensors 2020

Washington, DC United States
22–26 June 2020
ISBN: 978-1-943580-78-1

From the session
Compact/Wearable Chemical and Biological Sensors II (STh4G)

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R. Hainberger, P. Muellner, S. Nevlacsil, M. Eggeling, A. Maese-Novo, F. Vogelbacher, M. Sagmeister, J. Kraft, D. Seyringe, S. Trupp, M. Henfling, S. Plesshoff, J. Vaupot, M. Sladecek, E. Rank, and W. Drexler, "PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications," in Optical Sensors and Sensing Congress, OSA Technical Digest (Optica Publishing Group, 2020), paper STh4G.1.

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Abstract

We report the development of CMOS compatible PECVD silicon nitride waveguide based photonic integrated circuits and their application for optical coherence tomography (OCT) and colorimetric gas sensing.

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