Three-dimensional surface recovery with a regularized multi-frame phase shift algorithm

Fuqin Deng; Fuqin Deng; Edmund Y. Lam

doi:10.1364/SRS.2011.SMD3

Imaging and Applied Optics
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper SMD3
•https://doi.org/10.1364/SRS.2011.SMD3

Three-dimensional surface recovery with a regularized multi-frame phase shift algorithm

Fuqin Deng and Edmund Y. Lam

Signal Recovery and Synthesis 2011

Toronto Canada
10–14 July 2011
ISBN: 978-1-55752-914-5

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Optical Processing & Algorithms (SMD)

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F. Deng and E. Y. Lam, "Three-dimensional surface recovery with a regularized multi-frame phase shift algorithm," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper SMD3.

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Abstract

We develop a modified four-frame phase shift algorithm that incorporates a smoothness constraint. This is applied to a high-precision full-profile reconstruction and measurement for integrated circuit packages.

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