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  • Adaptive Optics: Analysis and Methods/Computational Optical Sensing and Imaging/Information Photonics/Signal Recovery and Synthesis Topical Meetings on CD-ROM
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper SMD3
  • https://doi.org/10.1364/SRS.2007.SMD3

Inverse Synthesis of Phase-Shifting Mask for Optical Lithography

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Abstract

We applied an inverse synthesis method to design phase-shifting mask (PSM) via gradient descent optimization under the coherent illumination assumption. The synthesized PSMs have high fidelity and sharp image slope.

© 2007 Optical Society of America

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