We propose and investigate a Silicon slotted Bragg grating waveguide coated with Titanium dioxide by Atomic Layer Deposition. The theoretical study, the fabrication process and the characterization are presented.

© 2013 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription

Supplementary Material (1)

» Media 1: PDF (1578 KB)