M. Roussey, P. Stenberg, A. Bera, M. Kuittinen, and S. Honkanen, "TiO2-filled Merged Photonic Crystal - Slot Waveguide,"
in Advanced Photonics 2013, X. Liu, C. Lu, W. Shieh, J. Cartledge, S. Savory, and C. Xie, eds.,
OSA Technical Digest (online)
(Optical Society of America, 2013), paper JT3A.14.
We propose and investigate a Silicon slotted Bragg grating waveguide coated with Titanium dioxide by Atomic Layer Deposition. The theoretical study, the fabrication process and the characterization are presented.