We demonstrate the efficiency improvement of solar cells based on silicon nanowires (SiNWs) by acid treatments of SiNWs. Catalytic Indium (In) residual is detrimental for In catalyzed SiNWs solar cell performance. We removed In contamination with hydrochloric acid. Scanning electron microscopy measurement verified that the amount of In on the top of SiNWs array is decreased. This leads to open-circuit voltage (Voc) increase thus the solar cell performance is improved. Dark current density-voltage test deceased clearly reveals that this open-circuit voltage is related to decrease dark current. That implies that efficiency improvement results from a reduced recombination through In.
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