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Glass Surface Structuring for Dosed Optical Scattering

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Abstract

Reactive ion etching of unstructured metal-coated borosilicate glass substrates is applied for surface modification. Depending on the process parameters different morphologies and extents of roughness are achieved. Each morphology shows specific optical scattering characteristics: thus user-defined tuning of the optical behavior is possible.

© 2010 Optical Society of America

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