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Integration of Superconducting Nanostripe Single-Photon Detectors with Dielectric Waveguides for Silicon Quantum Photonic Integrated Circuits

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Abstract

We report on design, fabrication, and characterization of superconducting nanostripe single-photon detectors integrated with dielectric optical waveguides, whereby part of the upper cladding is removed to enhance absorption of photons by the superconducting nanostripes.

© 2020 The Author(s)

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