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Conferences > QIM > 2019 > F5A > F5A.67

Ultra-low dissipation mechanical resonators for cavity optomechanics

Mohammad J. Bereyhi, Amir H. Ghadimi, Sergey A. Fedorov, Alberto Beccari, Ryan Schilling, Dalziel J. Wilson, Nils J. Engelsen, and Tobias J. Kippenberg

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Abstract

We study the theory of dissipation dilution and realize two experimental techniques—“elastic-strain engineering” and “clamp-tapering”—for exceptional mechanical quality factors (Q × f > 1015Hz) of high stress Si3N4 nanobeams at room temperature.

© 2019 The Author(s)

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