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Conferences > QELS > 2008 > JTuA > JTuA13
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JTuA13

Gas phase study of the reactivity of optical coating materials with hydrocarbons using a compact EUV laser

S. Heinbuch, F. Dong, J.J. Rocca, and E.R. Bernstein

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Abstract

We have conducted single photon ionization mass spectroscopy studies of the chemical reactivity of Sim/Tim/Hfm/Zrm/RumOn, metal oxide nanoclusters. The results are relevant to the carbon contamination of capping layers in extreme ultraviolet (EUV) reflective coatings.

© 2008 Optical Society of America

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