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Conferences > QELS > 2008 > JThA > JThA80
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JThA80

Optimization of SiNx Planar Microdisk High Q Resonators for Chip-scale Visible Integrated Photonics

Ehsan Shah Hosseini, Siva Yegnanarayanan, Mohammad Soltani, and Ali Adibi

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Abstract

Ultra-high Q (>5×105) microdisk resonators are demonstrated in a SiNx platform at 650nm with integrated in-plane coupling waveguides on a Si substrate. Critical coupling to firstorder radial-mode is demonstrated using pedestal layer to control coupling.

© 2008 Optical Society of America

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