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Conferences > QELS > 2006 > JTuD > JTuD50
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper JTuD50

Domain Engineering in LiTaO3 by Focused Charge Beam: from Micro to Nano scale

Xijun Li, Kazuya Terabe, Hideki Hatano, and Kenji Kitamura

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Abstract

In this study, 1-μm-dot domain by resist-assisted electron beam writing and 100-nm-wide line domain by focused ion beam domain patterning techniques have been demonstrated in LiNbO3 and LiTaO3 crystals thicker than tens of μm.

© 2006 Optical Society of America

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