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Conferences > QELS > 1997 > QWH > QWH1
  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 1997),
  • paper QWH1

Writing nanostructures with chromium and helium beams

T. Pfau, U. Drodofsky, J. Stuhler, Th. Schulze, B. Brezger, M. Drewsen, S. Nowak, and J. Mlynek

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Abstract

It is of considerable technological interest how new processes for nanofabrication can be used to go beyond resolution limits of optical lithography. The requirements for such new technologies are high resolution, parallel writing, and the possibility of transferring structures into any material.

© 1997 Optical Society of America

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