Abstract
The buried Si:SiO2 interface as a basic constituent of MOS devices is one of the most attractive objects for application of second harmonic generation (SHG). The SHG sources are attributed mostly to the broken inversion symmetry of Si:SiO2 interface. This symmetry breaking is caused by the crystalline structure discontinuity, the local strain,1 band bending by the external dc-electric field and/or the trapped charge,2 etc. Two specific scales enter into the oxide-thickness dependence of the SHG: the length lopt ~ 100 nm being the measure of nonuniformity of optical field as a result of the interference,3 and f0 - 1 nm determined by the microscopic structure of interface.
© 1996 Optical Society of America
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