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  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 1991),
  • paper QMC1

Optical approaches to monitoring and controlling semiconductor growth and processing

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Abstract

In the 1990's new performance capabilities will be realized through the development of new optoelectronic integrated circuit device and quantum-structure designs, size reductions of existing designs, and the increasing use of exotic combinations of materials. Accompanying these developments will be increasingly restrictive tolerances on critical parameters, such as material properties and layer thicknesses, and an increasingly competitive business environment that will place a heavy emphasis on cost reductions through improved yields and reliability.

© 1991 Optical Society of America

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