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Optica Publishing Group
  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 1991),
  • paper JThA3

Fabrication of 1 × 64 arrays of closely spaced, individually addressed top-surface-emitting laser diodes

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Abstract

We used a bilevel ion-blocking mask consisting of electroplated gold on photoresist to fabricate closely spaced (20 μm center-center) 1 × 64 arrays of wire bonded vertical-cavity top-surface-emitting1 laser diodes (VCTSELs). Crosstalk between adjacent lasers was found to be negligible despite closely spaced, long planar strip lines (see Fig. 1). Also, using frequency chirp across a wafer, we demonstrated closely spaced (<0.3 Å, 10 GHz) wavelength differences between channels. Closely spaced frequency channels should be useful for wavelength-division multiplexing.

© 1991 Optical Society of America

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