Abstract

Modern deposition technology applied to the fabrication of interference coatings in the vicinity of 100 Å has led to the development of surfaces on figured optics that produce high reflectivity with little or no introduction of phase distortion. Recent measurements using imaging systems built from such optics have demonstrated diffraction-limited optical performance in reduction cameras with resolutions better than 0.05 μm. This talk will review the technology behind the construction of such optics and present the results of an aggressive experimental program designed to exploit these concepts in advanced, ultra-high resolution lithographic applications. In addition, the use of these optics to increase greatly the usefulness of laser-plasmas as laboratory spectroscopic sources of light in the soft x-ray will be presented.

© 1991 Optical Society of America