Abstract

The importance of the perhalogenated methyl radicals in atmospheric chemistry (ozone destruction)1 and semiconductor manufacturing (etching using halocarbons)2 has been demonstrated to a certain extent. The optical spectra of these species will provide a diagnostic tool which will further elucidate the roles these species play in the above processes. We report the optical spectra of the three radicals CF2Cl, CFCl2, and CCl3.

© 1989 Optical Society of America

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References

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