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Conferences > Photonics > 2012 > MPo > MPo.27

Fabrication of high density waveguide structures using e-beam lithography

Sachin Kasture, Nikesh V.V., Gajendra Mulay, and Achanta Venu Gopal

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Abstract

Waveguides are an integral part of optical circuits. Fabrication of dense waveguides using electron-beam lithography is critical because of issues like stitching errors and proximity effect. We present a simple method to overcome these issues.

© 2012 Optical Society of America

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