High precision and high speed cutting of 4th generation OLED masks with LaserMicroJet®

T. A. Mai; B. Richerzhagen

doi:10.1364/PHAST.2007.PTuA5

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper PTuA5
•https://doi.org/10.1364/PHAST.2007.PTuA5

High precision and high speed cutting of 4^th generation OLED masks with LaserMicroJet^®

T. A. Mai and B. Richerzhagen

Photonic Applications Systems Technologies Conference 2007

Baltimore, Maryland United States
ISBN: 1557528349

From the session
Lasers in Device Manufacturing (PTuA)

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T. A. Mai and B. Richerzhagen, "High precision and high speed cutting of 4th generation OLED masks with LaserMicroJet®," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper PTuA5.

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Abstract

A new micro-machining technology - the water jet guided laser, also called as LaserMicroJet^® technology - has been developed for the manufacturing of sophisticated and heat sensitive OLED masks.

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