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Conferences > PhAST > 2007 > PThC > PThC2
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper PThC2
  • •https://doi.org/10.1364/PHAST.2007.PThC2

Asymmetrical M2 in solid state laser beam shaping for the line scanning laser annealing

Maxim Ya. Darscht, Yuri V. Miklyaev, Alexei V. Mikhailov, and Vitalij N. Lissotschenko

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Abstract

A new type of beam shaping system in combination with special characterization of laser parameters provides several mm depth of focus by narrow width and very good homogenization of the line-shaped laser intensity distribution for scanning annealing.

© 2007 Optical Society of America

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