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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper JWD7

Evaluating Micromachining Capabilities of High Power Diode Pumped Solid State Mode-locked and Q-switched Ultraviolet Laser

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Abstract

The micromachining capabilities of two newly developed DPSS mode-locked and q-switched UV lasers have been evaluated by studying ablation of commonly used materials in semiconductor, microelectronics, and solar cell industry.

© 2007 Optical Society of America

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